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Established in 1998, Hermes Microvision Inc.(HMI) has been committed to the research and development of the most advanced E-beam Inspection (EBI) tools and solutions for the leading semiconductor manufacturing fabs. Today, HMI is the leading supplier of EBI tools for both foundry and memory fabs worldwide. Based on our proprietary electron gun and column technologies and highly effective defect inspection algorithms, we deliver multiple product lines, including eScan® Series / ePTM Series / eXplore® Series, for various R&D and production applications.
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Description :
eP™series is the first e-beam hotspot process monitoring inspection system. eP™3xp offers highest detection sensitivity to electrical and physical defects suitable for both early R&D and in-line monitoring in mass production fabs. eP™3xp’s leading-edge image resolution and LFOV ( Large Field of View) enables effective pattern verification application such as OPC error and CDU measurement.
Value Proposition : |
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| eP™ Series |
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 An e-beam hotspot/weak-point process monitoring system
 with high throughput. |
An e-beam hotspot/weak-point process monitoring system that enables quick characterization of full
wafer property.
An e-beam hotspot/weak-point process monitoring system offers the highest VC and physical sensitivity.
An e-beam hotspot/weak-point process monitoring system with the lowest CoO.
An e-beam system with capability to measure CDU on an array of 2D structures, such as gate and AA of
SRAM array.
The eManager™ ADC system with the most advanced defect binning algorithm. |
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Applications :
eP™ series handles systematic variation of electrical and physical properties on the wafer surface. The typical application includes contact non-open, OPC error, piping, bridge, broken line and more for hotspot /weak-point processes monitoring. It is also very useful for defect inspection and characterization at early stage of R&D when defect density is very high. 2D CDU capability could allow customers to quickly identify the center of the photolithography process window. |
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