Established in 1998, Hermes Microvision Inc.(HMI) has been committed to the research and development of the most advanced E-beam Inspection (EBI) tools and solutions for the leading semiconductor manufacturing fabs. Today, HMI is the leading supplier of EBI tools for both foundry and memory fabs worldwide. Based on our proprietary electron gun and column technologies and highly effective defect inspection algorithms, we deliver multiple product lines, including eScan^® Series / eP^TM Series / eXplore^® Series, for various R&D and production applications.

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Corporate Social Responsibility

EHS Policy and Certificates

HMI treats pollution prevention as one of the main responsibilities and continuously promotes environment management programs with P-D-C-A management models through our ISO 14001 environment management system, accounting for both manufacturing costs and environment protection. The policies specific to the goal of environmental protection and energy goals are as follows:

Obey the Regulation: Aggressively and actively cooperating with government laws and customer regulations, reduce the occurrence of incidents to improve company reputation and customer satisfaction.
Save Energy: Push for energy saving at full scale to increase energy utilization rate and reduce cost.
Health Promotion: Care about the employee’s well-being and actively promote health related activities in the work place.
Continuous Improvement: Continuously improve environmental safety and sanitary issues to lower environment pollution and safety/sanitary hazard.

-Power Saving- The Company consumes energy mainly in the form of electricity with extremely rare cases of other form of energy used. In terms of energy conservation, the Company achieves its goal to lower indirect energy consumption, to cut power costs as well as to respond to the rise of global environmental protection awareness by using energy-saving buildings as well as energy-saving equipment. Relevant energy-saving measures are as follows: Dampers are installed at the clean rooms on the first floor at the storage area on the fifth floor for regulate conditioned airflow to areas in use and thereby reduces waste. (As shown in Figure 1) Replace the set-time activation functionality of the induction windmills in B1 and B2 floors with automatic activation in order to save energy and to cut noises generated by the wind mills. FFU rotation speed at 3F clean room adjusted from top notch to third notch, saving energy and reducing microseisms (from 135W to 75W). Utilizes efficient physics-based cleaning devices instead of traditional chemical-based agents in cooling towers, saving 5-10% of electricity used. (As shown in Figure 2)

Figure 1	Figure 2

-Water saving/discharge reduction programs- The Company’s factories mainly consume water for general purposes, with extremely small amount of water used in the manufacturing process (purified water is used to clean components). The top priority of the Company’s water resource management policy is to reduce water usage and then to enhance recycling efficiency in order to increase water reuse rate. In 2015, the Company recorded an average water discharge rate of 21%, far lower than that of the Science Park (35% to 70%). The Company’s water saving/discharge reduction measures are as follows: Utilizes efficient physics-based cleaning agents instead of traditional chemical-based ones in cooling towers, increasing conductivity to 2,500us and enhancing concentration ratio to drastically cut back on discharge volume by 70% from the original estimate of 6.6 ton/day to 2.13 ton/day. A 2,500 m³ rainwater collection pool to provide water for cooling towers and flash toilets, urinals and plant watering.( As shown in Figure 3) Two 6KW solar water heaters (storage 500L each), producing 60℃ hot water for kitchen use. Components utilized for hygiene equipment and faucets are all certified with the water- saving label.( As shown in Figure 4) Automatic valves in automatic sprinklers are reset to activate every 3 minutes instead of 5 minutes in order save water.

Figure 3	Figure 4

To ensure the proper and safe disposal of waste produced in the manufacturing process, the Company has obtained certification for its waste disposal plans and has also stipulated clear internal waste disposal principles in order to minimize the possible impact on the environment. Based on these principles, we continuously increase the waste recycle rate and have commissioned certified waste disposal/treatment vendors to collect and recycle waste. In this way, the Company not only can lower the management cost of the waste it produces and but also reduce environment pollution by efficiently handling waste disposal. There are mainly two sources of waste in the Company – household waste and general manufacturing waste. The Company aims to cut household waste through employee education and training in order to better implement waste reduction and garbage classification, increasing recyclability and reuse value of waste. In terms of general manufacturing waste, the Company aims to increase recycling rate mainly through projects such as the optimization of package material, dismantling and classification of electronic components. Under its waste classification and management efforts, the Company had been maintaining a recycling rate of over 60% from 2012 to 2014. After moving to the new plant in 2015, the Company implemented its waste classification management with more strictly defined categories of classification, resulting in a recycling rate of 84% this year. The company will keep on implementing waste reduction, classification and recycling with the aim to maintain its recycling rate over 80% and to better recycle waste. At the Company’s office area in Hsinchu, the average recycle rate in 2015 reached 57.43%, with only 0.64 kg of household waste generated per person per month.

Garbage Classification Training	Recycling Yard
In addition to the aforementioned types of waste, the Company also generates a small amount of hazardous industrial waste. To handle this type of waste, which mainly comes from the chemical solutions used in the cleaning of machinery and components, the Company will give priority to considering the possibility for reuse in the manufacturing process in order to achieve the goals for reusing and raw material conservation. If the solution waste cannot be reused, the Company will collect 100% of it through a comprehensive management process and stores it in blast-proof cabinets. After a certain amount of such waste is collected, it will be delivered to the Recycling Center of the Southern Taiwan Science Park, which is commissioned by the Company to incinerate the waste.

Used solutions are properly stored in blast-proof cabinets

Indoor Air Quality Management

Decrease the use of raw materials with high toxicity/volatility or use substitutes instead
(such as replacing IPA with ethanol).
Prevent the use of solvent type consumer products in the office area.
Low-formaldehyde green construction materials are used for interior design and decoration.
The amount of ventilation and ventilation frequency are controlled by a CO2
sensor of the Air Handler Unit to improve air quality.

Air Pollution Emission Control

Waste gas produced from the manufacturing process is collected in the pipeline
system and discharged after the treatment of active carbon adsorption.
� Decrease or cease any production procedure that emits pollutants.

There are three sources of greenhouse gas emissions at the Hermes Microvision, Inc.: the first comes from directly emissions such as generator fuels, gas for official car, cooking oil for restaurants, escaped air conditioning refrigerant and sceptic tanks; the second source mainly comes in the form of indirect emissions such as that generated from purchased electricity; the third from periodically disclosed emissions from activities such as employee trips, transportation of products and components, production processes of raw material suppliers, waste recycling and disposal as well as other indirect emissions.

2015 greenhouse gas emissions statistics

Direct greenhouse gas emissions (Scope1)	Indirect greenhouse gas emissions through energy (Scope2)
2,302 tons CO2e	2,866 tons CO2e